Nanoscale Horiz., 2023, Accepted Manuscript
DOI: 10.1039/D2NH00567K, Communication
DOI: 10.1039/D2NH00567K, Communication
Xiaoman Zhang, Eric A Stach, Wen Jin Meng, Andrew Chengsi Meng
We report growth of epitaxial wurtzite AlScN thin films on Si(111) substrates with a wide range of Sc compositions using ultra-high vacuum reactive sputtering. Sc alloying in AlN enhances piezoelectricity...
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We report growth of epitaxial wurtzite AlScN thin films on Si(111) substrates with a wide range of Sc compositions using ultra-high vacuum reactive sputtering. Sc alloying in AlN enhances piezoelectricity...
The content of this RSS Feed (c) The Royal Society of Chemistry