Nanoscale Horiz., 2020, 5,869-879
DOI: 10.1039/C9NH00709A, Communication
DOI: 10.1039/C9NH00709A, Communication
Open Access
  This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence.Lucia Romano, Matias Kagias, Joan Vila-Comamala, Konstantins Jefimovs, Li-Ting Tseng, Vitaliy A. Guzenko, Marco Stampanoni
Gas-MacEtch of Si with a Pt catalyst allows vertical etching nanostructures with an extreme aspect ratio up to 10 000 : 1.
The content of this RSS Feed (c) The Royal Society of Chemistry
Gas-MacEtch of Si with a Pt catalyst allows vertical etching nanostructures with an extreme aspect ratio up to 10 000 : 1.
The content of this RSS Feed (c) The Royal Society of Chemistry