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Scalable fabrication of a complementary logic inverter based on MoS2 fin-shaped field effect transistors

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Nanoscale Horiz., 2019, 4,683-688
DOI: 10.1039/C8NH00419F, Communication
Yann-Wen Lan, Po-Chun Chen, Yun-Yan Lin, Ming-Yang Li, Lain-Jong Li, Yu-Ling Tu, Fu-Liang Yang, Min-Cheng Chen, Kai-Shin Li
Integration of both n-type and p-type MoS2 fin-shaped field effect transistors by using a traditional implantation technique for complementary field effect transistor is demonstrated. The complementary MoS2 inverter with high DC voltage gain of more than 20 is acquired.
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