Nanoscale Horiz., 2024, 9,1990-1998
DOI: 10.1039/D4NH00339J, Communication
DOI: 10.1039/D4NH00339J, Communication


Minjae Kim, Yongsu Lee, Kyuheon Kim, Giang-Hoang Pham, Kiyung Kim, Jae Hyeon Jun, Hae-won Lee, Seongbeen Yoon, Hyeon Jun Hwang, Myung Mo Sung, Byoung Hun Lee
This study proposes an ultrathin tellurium (Te) atomic layer deposition process with a TeOx seed layer to overcome large electrical hysteresis. It also identifies causes of defects, aiding high-performance p-type inorganic transistors.
The content of this RSS Feed (c) The Royal Society of Chemistry
This study proposes an ultrathin tellurium (Te) atomic layer deposition process with a TeOx seed layer to overcome large electrical hysteresis. It also identifies causes of defects, aiding high-performance p-type inorganic transistors.
The content of this RSS Feed (c) The Royal Society of Chemistry