Nanoscale Horiz., 2023, 8,674-684
DOI: 10.1039/D2NH00567K, Communication
DOI: 10.1039/D2NH00567K, Communication
Xiaoman Zhang, Eric A. Stach, W. J. Meng, Andrew C. Meng
We report the growth of epitaxial wurtzite AlScN thin films on Si (111) substrates with a wide range of Sc concentrations using ultra-high vacuum reactive sputtering.
The content of this RSS Feed (c) The Royal Society of Chemistry
We report the growth of epitaxial wurtzite AlScN thin films on Si (111) substrates with a wide range of Sc concentrations using ultra-high vacuum reactive sputtering.
The content of this RSS Feed (c) The Royal Society of Chemistry